AW-1008 Plasma Asher

AW-1008 Plasma Asher from Allwin21 Corp

By: Allwin21 Corp  11/22/2015
Keywords: plasma asher

The AW-1008 single-wafer photoresist asher is an automated tool designed as a flexible downstream Microwave plasma photoresist removal system for high-volume wafer fabrication.  The AW-1008 is in direct response to manufacturer’s concerns for wafer sensitivity to processing RF damage, uptime, reliability and production-proven technology.
AW-1008 Key Features:

  • Production-proven plasma stripper/Asher system technology.
  • 5-15% Uniformity. (Process & Hardware dependent. )
  • Fast strip/ash rate. (Process & Hardware dependent. )
  • Increased throughput with 3-Axis Integrated Robust Solid Robot.
  • Frontside and backside isotropic removal.
  • 3x 1kW IR Lamp for uniform heating up to 500C.
  • 75mm-150mm wafer capability.
  • Endpoint detection w/Allwin21 SLOPE technology (Optional)
  • 2 wafer sizes capability without hardware change if necessary.
  • Two Fixed cassette stations. Or, one Fixed & one centering station.
  • Can handle 50um thickness wafer
  • PC controller with Advanced Allwin21 Software Package
  • Up to 4 gas lines with MFC’s
  • 45GHz 1000W Microwave
  • Pressure control with Throttle Valve
  • Touch screen monitor
  • EMO, Interlocks, and Watchdog function
  • GEM/SECS II interface, Optional
  • Small Footprint
  • Made in U.S.A.

AW-1008 Software Key Features:
  • Real time graphics display, process data acquisition, and analysis.
  • Closed-loop process parameters control.
  • Precise parameters profiles tailored to suit specific process requirements.
  • Programmable comprehensive calibration of all subsystems from within the software. This allows faster, easier calibration, leading to enhanced process results.
  • Recipe creation. It features a recipe editor to create and edit recipes to fully automate the processing of wafers inside the process chamber.
  • Validation of the recipe so improper control sequences will be revealed.
  • Storage of multiple recipes, process data and calibration files so that process and calibration results can be maintained and compared over time.
  • Passwords provide security for the system, recipe editing, diagnostics, calibration and setup functions
  • Simple and easy to use menu screen which allow a process cycle to be easily defined and executed.
  • Troubleshooting features which allows engineers and service personnel to activate individual subassemblies and functions. More I/O, AD/DA “exposure”.
  • DB-25F parallel (printer) port. The computer interfaces to the Allwin21 system with only one cable: the control interface cable.
  • The control board inside the machine that translates the computer commands to control the machine has a watchdog timer. If this board looses communication with the control software, it will shut down all processes and halt the system until communication is restored.
  • GEM/SECS II function (Optional).
  • Advanced Allwin21 EOP function (Optional)

Keywords: plasma asher

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